Detection of streptavidin-biotin protein complexes using a MOSFET-type biosensor with extended gate

Jang-Kyoo Shin; Dong-Sun Kim; Jee-Eun Park

doi:10.1117/12.639239

19 January 2006 Detection of streptavidin-biotin protein complexes using a MOSFET-type biosensor with extended gate

Jang-Kyoo Shin, Dong-Sun Kim, Jee-Eun Park

Proceedings Volume 6036, BioMEMS and Nanotechnology II; 60361M (2006) https://doi.org/10.1117/12.639239
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

In this paper, we propose a MOSFET-type biosensor in which an extended gate is formed on the bottom of silicon microfluidic channel across the (111) silicon sidewall. Electrical characteristics of the sensor were measured in the solution containing streptavidin-biotin protein complexes. The connection between MOSFET and micro-fluidic channel system could be achieved with the proposed device, offering merits of isolation between the device and solution, compatibility with the integrated circuit technology and applicability in the micro total analysis system. The device was fabricated on the basis of the semiconductor integrated circuit fabrication and micro-electro mechanical system technology. Au was used as the extended gate metal to form a self-assembled monolayer of thiol which was used to immobilize streptavidin and biotin. Atomic force microscopy was used to observe the presence of biomolecules on Au electrode.

Citation Download Citation

Jang-Kyoo Shin, Dong-Sun Kim, and Jee-Eun Park "Detection of streptavidin-biotin protein complexes using a MOSFET-type biosensor with extended gate", Proc. SPIE 6036, BioMEMS and Nanotechnology II, 60361M (19 January 2006); https://doi.org/10.1117/12.639239

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