Design research of nanopositioner based on SPM and its simulation of FEM

Zhenyu Zhang; Hongqi Li; Hongxiu Zhou; Linan Li; Xiangjun Liu

doi:10.1117/12.667854

7 February 2006 Design research of nanopositioner based on SPM and its simulation of FEM

Zhenyu Zhang, Hongqi Li, Hongxiu Zhou, Linan Li, Xiangjun Liu

Proceedings Volume 6032, ICO20: MEMS, MOEMS, and NEMS; 603209 (2006) https://doi.org/10.1117/12.667854
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A novel nanopositioning stage was designed according to the scanning property of SPM with flexure hinge as kinematic structure and piezoelectric ceramic as actuator. Kinetic precision and X directional area of nanopositioner are 1.55nm and 26.4 micron, respectively, which is demonstrated by kinetic analysis and finite element method FEM simulation. Designed nanopositioner based on SPM moves at 3 dimensions with nanometer scale and its motion of X, Y, and Z directions is decoupled and isotropic. Furthermore, frame of nanopositioner is simple and manufacturing is convenient, which will have broad prospect in the field of nanopositioning and nanotracing.

Citation Download Citation

Zhenyu Zhang, Hongqi Li, Hongxiu Zhou, Linan Li, and Xiangjun Liu "Design research of nanopositioner based on SPM and its simulation of FEM", Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 603209 (7 February 2006); https://doi.org/10.1117/12.667854

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