Interferometer-less surface profilerometer

Ponciano Rodriguez; Jose Lorenzo; Feng Jin; Sudhir Trivedi; Chen-Chia Wang; Nibir K. Dhar; Steven Fairchild

doi:10.1117/12.634483

24 October 2005 Interferometer-less surface profilerometer

Ponciano Rodriguez, Jose Lorenzo, Feng Jin, Sudhir Trivedi, Chen-Chia Wang, Nibir K. Dhar, Steven Fairchild

Proceedings Volume 6017, Nanophotonics for Communication: Materials and Devices II; 60170C (2005) https://doi.org/10.1117/12.634483
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

We demonstrate experimentally an optical scanning technique for measuring the step heights of surface features without using conventional optical interferometers. This technique involves the deployment of the so-called photo-EMF sensors that are capable of sensing the presence of step-like features on an otherwise optically flat surface. Scanning of the target surface is achieved by rotating the object being investigated while keeping the laser beam stationary. Theoretical modeling and experimental data will be presented indicating the resolution of step-like features with merely 15 nm in height.

Citation Download Citation

Ponciano Rodriguez, Jose Lorenzo, Feng Jin, Sudhir Trivedi, Chen-Chia Wang, Nibir K. Dhar, and Steven Fairchild "Interferometer-less surface profilerometer", Proc. SPIE 6017, Nanophotonics for Communication: Materials and Devices II, 60170C (24 October 2005); https://doi.org/10.1117/12.634483

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