Paper
1 September 2005 Near field optical nano patterning on azobenzene based photoresponsive molecular glass
Chaemin Chun, Sangjin Kwon, Sungho Jeong, Dong Yu Kim
Author Affiliations +
Abstract
Near field optical nano patterning was investigated using azobenzene based amorphous molecular glass material, which shows fast response to the light and higher diffraction efficiency for short irradiation time compared to common azo polymers. Optical patterning was performed using NSOM equipped with a He-Cd laser as the light source and a cantilever with 100 nm aperture diameter. Macroscopic motion of photoresponsive materials containing azobenzene groups was useful to fabricate the well defined nano structures such as dots and line array without nanomask and development process by control of irradiation time and scan speed.
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Chaemin Chun, Sangjin Kwon, Sungho Jeong, and Dong Yu Kim "Near field optical nano patterning on azobenzene based photoresponsive molecular glass", Proc. SPIE 5939, Organic Holographic Materials and Applications III, 59390P (1 September 2005); https://doi.org/10.1117/12.620218
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KEYWORDS
Near field

Near field optics

Optical lithography

Glasses

Near field scanning optical microscopy

Polymers

Nanoprobes

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