Vibration measurement of MEMS by digital laser microinterferometer

Sheng Liu; Dan Thomas; Praveen R. Samala; Lian Xiang Yang

doi:10.1117/12.617592

18 August 2005 Vibration measurement of MEMS by digital laser microinterferometer

Sheng Liu, Dan Thomas, Praveen R. Samala, Lian Xiang Yang

Author Affiliations +

Proceedings Volume 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II; 58780C (2005) https://doi.org/10.1117/12.617592
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

A digital laser microinterferometer with a capability to measure both static and dynamic properties of MEMS (Micro-Electro-Mechanical Systems) and microstructures has been developed. This system is designed to exploit a static and a dynamic measurements of microstructure such as MEMS with either a smooth or a rough surface. The method is based on digital laser Michelson interferometry and digital speckle pattern speckle interferometry (TV - holography) incorporated with optoelectronic devices including a special illumination system, a long distance microscope (LDM), a CCD camera, a high precise phase shifting unit and a signal generator for vibration measurement. The special illumination system can perform both a continuous (for static measurements) and a stroboscopic (for dynamic measurements) illumination by utilizing a Acoustic-Optic-Modulator (AOM). In this paper, the theory and methodology of the digital laser micro-interferometer with the stroboscopic illumination method are described. The usefulness of the micro-interferometer is demonstrated by examples of static and dynamic measurements for different MEMS.

Citation Download Citation

Sheng Liu, Dan Thomas, Praveen R. Samala, and Lian Xiang Yang "Vibration measurement of MEMS by digital laser microinterferometer", Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780C (18 August 2005); https://doi.org/10.1117/12.617592

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE