Comparison of methods for the determination of the aperture correction of interference microscopes

Rolf Kruger-Sehm

doi:10.1117/12.612594

26 August 2005 Comparison of methods for the determination of the aperture correction of interference microscopes

Rolf Kruger-Sehm

Proceedings Volume 5858, Nano- and Micro-Metrology; 585810 (2005) https://doi.org/10.1117/12.612594
Event: Optical Metrology, 2005, Munich, Germany

Abstract

For precision traceable measurements with interference microscopes it is necessary to know the aperture correction factor. The source of the correction is the finite diameter of the illumination light source. If there is no further knowledge about it, the usual way is the calibration of the instrument with a reference standard. In this contribution a practical way is described to determine the aperture correction factor of an interference microscope by direct measuring the diameter of the illumination aperture. A diffraction pattern of a line scale is directed into the microscope objective. In the back focal plane the set of diffraction orders acts a scale with known dimension. The scale of the diffraction orders can be observed through the eye piece tube together with the image of the aperture. Under the assumption of an accepted model the correction factor can be determined. Some considerations for the practical use and results are presented.

Citation Download Citation

Rolf Kruger-Sehm "Comparison of methods for the determination of the aperture correction of interference microscopes", Proc. SPIE 5858, Nano- and Micro-Metrology, 585810 (26 August 2005); https://doi.org/10.1117/12.612594

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