Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications

Nien Hua Lu; Yu Min Chang; Din Ping Tsai

doi:10.1117/12.612255

26 August 2005 Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications

Nien Hua Lu, Yu Min Chang, Din Ping Tsai

Author Affiliations +

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580W (2005) https://doi.org/10.1117/12.612255
Event: Optical Metrology, 2005, Munich, Germany

Abstract

We describe the optimum design of the near-field scanning optical microscope (NSOM) based on a short probe tapping mode tuning-fork (TMTF) configuration and its applications in optoelectronic characterization and optical measurements. The short probe TMTF-NSOM is constructed to operate both in collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as the light collector/emitter as well as the force sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged by collection mode. On the other hand, excitation mode of short probe TMTF-NSOM is applied to perform near-field surface photovoltage measurements on AlGaInP light emitting diode structures.

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Nien Hua Lu, Yu Min Chang, and Din Ping Tsai "Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580W (26 August 2005); https://doi.org/10.1117/12.612255

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