Portable interference device for roughness measurement

Oleg V. Angelsky; Peter P. Maksimyak

doi:10.1117/12.612533

26 August 2005 Portable interference device for roughness measurement

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580L (2005) https://doi.org/10.1117/12.612533
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase variation less than unit. The proposed diagnostic method is applicable to arbitrarily shaped surfaces. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 0.001 μm.

Citation Download Citation

Oleg V. Angelsky and Peter P. Maksimyak "Portable interference device for roughness measurement", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580L (26 August 2005); https://doi.org/10.1117/12.612533

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