Paper
2 June 2005 Compact sub-micron focused laser beam using integrated Bessel phase control
Author Affiliations +
Abstract
We report the integration of phase gratings directly onto the surface of red vertical cavity surface emitting lasers (VCSELs) by Focused Ion Beam etching. Gratings have been used to generate quasi Bessel beams. The fabricated devices show that a diffraction limited central spot can be formed above the surface of the device. The narrow spot has a full width at half maximum of 0.5μm at a distance of 2μm above the VCSEL surface. The compact device can be formed in arrays and can be considered for a large number of sensing applications such as an optical probe for biophotonics and in optical recording systems.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Justice, P. Lambkin, B. Roycroft, and B. Corbett "Compact sub-micron focused laser beam using integrated Bessel phase control", Proc. SPIE 5824, Opto-Ireland 2005: Nanotechnology and Nanophotonics, (2 June 2005); https://doi.org/10.1117/12.605685
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Vertical cavity surface emitting lasers

Diffraction gratings

Mirrors

Etching

Diffraction

Bessel beams

Ion beams

Back to Top