Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Yoshikazu Hishinuma; Eui-Hyeok Yang; Bruce Martin Levine; Eric E. Bloemhof

doi:10.1117/12.591275

22 January 2005 Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Yoshikazu Hishinuma, Eui-Hyeok Yang, Bruce Martin Levine, Eric E. Bloemhof

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.591275
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

Citation Download Citation

Yoshikazu Hishinuma, Eui-Hyeok Yang, Bruce Martin Levine, and Eric E. Bloemhof "Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.591275

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