Highly Integrated Distributed-Index Planar Microlens And Its Characteristics

M. Oikawa; K. Tanaka; T. Yamasaki

doi:10.1117/12.949256

14 February 1986 Highly Integrated Distributed-Index Planar Microlens And Its Characteristics

M. Oikawa, K. Tanaka, T. Yamasaki

Proceedings Volume 0554, 1985 International Lens Design Conference; (1986) https://doi.org/10.1117/12.949256
Event: 1985 International Lens Design Conference, 1985, Cherry Hill, United States

Abstract

A. 2-D arrayed planar microlens with a diameter of 180 μm was monolithically integrated by an ion exchange technique. The focal length of the lens was 0.45 mm and N.A. was as large as 0.2. Distance between each lens is about 190 pm in the longitudinal direction and 300 μm in the vertical direction. Aberration of the lens can be controlled by applied voltage at the electromigration.

Citation Download Citation

M. Oikawa, K. Tanaka, and T. Yamasaki "Highly Integrated Distributed-Index Planar Microlens And Its Characteristics", Proc. SPIE 0554, 1985 International Lens Design Conference, (14 February 1986); https://doi.org/10.1117/12.949256

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