Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method

Krzysztof Patorski; Zbigniew Sienicki; Michal Pawlowski; Adam R. Styk; Agata Józwicka

doi:10.1117/12.545450

17 August 2004 Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method

Krzysztof Patorski, Zbigniew Sienicki, Michal Pawlowski, Adam R. Styk, Agata Józwicka

Author Affiliations +

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545450
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Numerical simulations of the influence the phase step miscalibration and average intensity differentiation between the frames on the calculated interferogram contrast using the temporal phase shifting method (TPS) are presented. The fringe function includes in its argument the amplitude of vibration studied by the time-average method. Some features of the TPS method known from the interferogram phase calculations are confirmed and properties characteristic to contrast determination are established. Experimental studies of vibration resonant mode patterns of silicone microelements provide corroboration of theoretical and numerical findings.

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Krzysztof Patorski, Zbigniew Sienicki, Michal Pawlowski, Adam R. Styk, and Agata Józwicka "Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545450

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