Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

David Grigg; Eric Felkel; John Roth; Xavier Colonna de Lega; Leslie Deck; Peter J. de Groot

doi:10.1117/12.546211

16 August 2004 Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, Peter J. de Groot

Author Affiliations +

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.546211
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

We report on characterization techniques for microstructures using white-light interference microscopy. Capabilities include surface profilometry, integrated profilometry and lateral metrology for full 3D characterization, defect detection, profilometry of thin film structures, stroboscopic interferometry of vibrating samples, and real-time profile snapshots of moving MEMS devices.

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David Grigg, Eric Felkel, John Roth, Xavier Colonna de Lega, Leslie Deck, and Peter J. de Groot "Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.546211

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