Integration of germanium waveguide photodetectors for optical intra-chip interconnects

Mathieu Rouviere; Mathieu Halbwax; Jean-Luc Cercus; Eric Cassan; Laurent Vivien; Daniel Pascal; Michel Heitzmann; Jean-Michel Hartmann; Daniel Bouchier; Suzanne Laval

doi:10.1117/12.544996

8 September 2004 Integration of germanium waveguide photodetectors for optical intra-chip interconnects

Mathieu Rouviere, Mathieu Halbwax, Jean-Luc Cercus, Eric Cassan, Laurent Vivien, Daniel Pascal, Michel Heitzmann, Jean-Michel Hartmann, Daniel Bouchier, Suzanne Laval

Author Affiliations +

Proceedings Volume 5453, Micro-Optics, VCSELs, and Photonic Interconnects; (2004) https://doi.org/10.1117/12.544996
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

This paper presents the potential characteristics of germanium photodetectors integrated in silicon-on-insulator optical waveguides for intra-chip optical interconnects. Experimental results on the optical absorption, from 1.1 μm to 1.7 μm of Ge layers epitaxially grown on Si are reported, as well as the measured responsivity of an interdigited MSM Ge photodetector. Light coupling from a rib SOI waveguide to a Ge photodetector is studied for two possible configurations: butt coupling or Ge deposition on top of the waveguide. Comparisons between MSM and PIN Ge detectors are carried out by estimating the dark current, capacitance and time response.

Citation Download Citation

Mathieu Rouviere, Mathieu Halbwax, Jean-Luc Cercus, Eric Cassan, Laurent Vivien, Daniel Pascal, Michel Heitzmann, Jean-Michel Hartmann, Daniel Bouchier, and Suzanne Laval "Integration of germanium waveguide photodetectors for optical intra-chip interconnects", Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); https://doi.org/10.1117/12.544996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available