Characterization of microelectromechanical (MEMS) HF-switches

Maxim V. Shakhrai; Christoph Huth; Hans Joachim Quenzer; Thomas Lisec

doi:10.1117/12.555376

5 April 2004 Characterization of microelectromechanical (MEMS) HF-switches

Maxim V. Shakhrai, Christoph Huth, Hans Joachim Quenzer, Thomas Lisec

Proceedings Volume 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2004) https://doi.org/10.1117/12.555376
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Microelectromechanical capacitive radiofrequency switches are considered. Design and technological process are reported. Switching characteristics and thermal behavior are investigated. Ways to improve the measured parameters are shown. The switches are prospective for wireless telecommunication systems, in particular for mobile communications.

Citation Download Citation

Maxim V. Shakhrai, Christoph Huth, Hans Joachim Quenzer, and Thomas Lisec "Characterization of microelectromechanical (MEMS) HF-switches", Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); https://doi.org/10.1117/12.555376

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