Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication

Erol C. Harvey; Jason P. Hayes

doi:10.1117/12.529651

2 April 2004 Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication

Erol C. Harvey, Jason P. Hayes

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.529651
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Excimer laser ablation is widely used to create a variety of 3D structures and shapes in polymeric materials. The ablated features may be used directly, as moulds that can be electroplated to form tooling, or from which replicas may be cast in elastomeric materials such as PDMS. Irrespective of how the ablated structure will be used, a common set of difficulties is often encountered, namely the redeposition of ablation debris, the non-uniform nature of the bottom of the ablated site, and limits to the aspect ratio. This paper gives experimental descriptions of these phenomena and suggests that the dynamics of the plasma plume created by laser ablation is important in understanding their behavior. Qualitative observations are presented that show that these effects can be modified depending upon the shape of the feature being ablated.

Citation Download Citation

Erol C. Harvey and Jason P. Hayes "Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.529651

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