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24 April 2003 Electromechanical microscanners efficiency enhancement using modeling results
Nikolay Ivanovich Mukhurov, Georgy I. Efemov
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Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499324
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain
Abstract
One of main exploitation parameters of scanners, which determine their efficiency, is reflected beams deflection range. At present, this angle does not exceed ±3 to ±5 mrad, which does not satisfy modern requirements. Specific calculations for particular design versions do not reflect general rules of electrostatic microsensors’ snap-into-action. We have obtain the relations enabling to reveal general snap-into-action rules for torsion electromechanical devices due to introduction of relative values of the turn (bend) and the distance from the torsions’ axis to the beginning and to the end of immovable electrodes. Analysis of dependencies has shown that in equilibrium state condition it is possible, in principle, to obtain controllable anchor turning along the whole inter-electrodes gap. Design versions are proposed, which enable: to reduce electrostatic attraction forces due to reduction of immovable electrode length and giving a pointed shape to its end; to increase reactive moments in torsions under the anchor’s turn to a critical angle; to reduce electrostatic moment due to enlargement of inter-electrodes distance under the movable electrode ends to n times comparing to calculated values. The proposed directions of electrostatic fields and mechanical reactions change allow, under a permissible voltage increase in 1.5 to 2 times, to improve the main exploitation parameter of microscanners - mirror’s turning angle, which provides substantial broadening of their functional abilities.
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Nikolay Ivanovich Mukhurov and Georgy I. Efemov "Electromechanical microscanners efficiency enhancement using modeling results", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499324
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KEYWORDS
Electrodes
Actuators
Electromechanical design
Microelectromechanical systems
Microsensors
Mirrors
Scanners
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