Paper
24 April 2003 A 4-bit digital MEMS phase shifter
Jian Zhu, Bailing Zhou, Jinting Lin, Yuanwei Yu, Le Lu
Author Affiliations +
Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498844
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain
Abstract
A 4-bit digital MEMS phase shifter, based on RF MEMS series switches and switched-line design, is presented. The phase shifter is fabricated on a 360 μm-thick silicon substrate, and the chip size is smaller than 5×8 mm 2. The simulation performance of 16 phase states shows that at X-band the worst insertion phase deviation is 8 degree from the desired value, the insertion loss is less than -2.0dB and the VSWR is less than 1.8.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jian Zhu, Bailing Zhou, Jinting Lin, Yuanwei Yu, and Le Lu "A 4-bit digital MEMS phase shifter", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498844
Lens.org Logo
CITATIONS
Cited by 2 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Phase shifts

Microelectromechanical systems

Switches

Silicon

X band

Capacitors

Device simulation

RELATED CONTENT

Ultra high efficiency III V on Si MOS capacitor Mach...
Proceedings of SPIE (October 25 2018)
Micromechanical dc-dc converter
Proceedings of SPIE (April 05 2001)
MEMS technologies for rf communications
Proceedings of SPIE (April 30 2001)

Back to Top