Analysis of imaging performance degradation

Koichi Matsumoto; Tomoyuki Matsuyama; Shigeru Hirukawa

doi:10.1117/12.485465

26 June 2003 Analysis of imaging performance degradation

Koichi Matsumoto, Tomoyuki Matsuyama, Shigeru Hirukawa

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485465
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

The wavefront aberration that is generally represented with Zernike polynomials is an approximate representation. The reasons are that, in actual optics, the wavefront has such frequency component that cannot be represented with Zernike polynomials. Moreover, it can never be scalar or monochromatic. Instead, it must be vector and polychromatic. Higher frequency component beyond Zernike representation could cause a local flare that will be observed in the surrounding area of nominally bright patterns. Vector aspect of light leads to imaging degradation combined with birefringence of the material. Even with a narrowed spectral bandwidth of excimer lasers, chromatic aberration could be a factor that impacts imaging performance. Lateral, rather than axial, chromatic aberration can be critical because it is influential to CD uniformity across the field. This paper describes the factors that deteriorate imaging performance based on Nikon’s optics, and finally concludes hat our optics is well balanced among these factors.

Citation Download Citation

Koichi Matsumoto, Tomoyuki Matsuyama, and Shigeru Hirukawa "Analysis of imaging performance degradation", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485465

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