Use of asymmetric dual-cavity filters to track small H and L variations as a tool to increase yield of DWDM filters

David I. C. Pearson; Paul Luff; Mervyn Davis; Arthur T. Howe

doi:10.1117/12.475756

9 July 2003 Use of asymmetric dual-cavity filters to track small H and L variations as a tool to increase yield of DWDM filters

David I. C. Pearson, Paul Luff, Mervyn Davis, Arthur T. Howe

Author Affiliations +

Proceedings Volume 4998, Photonic Integrated Systems; (2003) https://doi.org/10.1117/12.475756
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

We show that asymmetric dual cavity filters, comprising one cavity of Ta₂O₅ (H) and the other of SiO₂ (L), can be designed so that the asymmetry in the transmission intensity between the two peaks is sensitive enough to detect H/L ratio changes down to 1.0001. This accuracy is necessary for precise uniformity determinations for 100 GHz filter production. We show that interpretation of asymmetry changes is still valid despite small absorption or scatter losses due to either of the materials, and also despite small layer thickness errors which have been optically compensated by the optical monitoring system during deposition of the filter. We illustrate the use of asymmetry in adjusting the H/L ratio within 1.0001 at larger and smaller radii away from the optical monitor band on an 8" diameter disc, and also for checking azimuthal variations. Combining the asymmetry data with the wavelength shift data enabled the individual H and L calibrations to be deconvoluted from the multilayer data. This technique is far more accurate than measuring individual material calibration runs, and also takes account of multilayer effects such as interfacial mixing and process sequencing. Ion beam sputtering process parameters were varied to maximize the uniformity and increase the yield for cost-reduction of 100 GHz filters, and the application to 50 GHz filter yield enhancement is discussed.

Citation Download Citation

David I. C. Pearson, Paul Luff, Mervyn Davis, and Arthur T. Howe "Use of asymmetric dual-cavity filters to track small H and L variations as a tool to increase yield of DWDM filters", Proc. SPIE 4998, Photonic Integrated Systems, (9 July 2003); https://doi.org/10.1117/12.475756

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