Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings

Lun Shi

doi:10.1117/12.477835

17 January 2003 Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings

Lun Shi

Author Affiliations +

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477835
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A novel method called phase scanning is suggested in this paper, with which varied line-space diffraction grating can be fabricated on a classically photoelectric ruling engine. An experimentally blazed varied line-space plane grating with a central groove density of 1200 g/mm was fabricated. The space increment varies from -0.332nm to +0.332nm. A test to examine the scanning phase method was also made on it.

Citation Download Citation

Lun Shi "Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477835

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