Inverse model for optimizing the process of fabricating a microstructure by laser chemical vapor deposition

Chaoyang Zhang; Weizhong Dai; Raja Nassar; Hong Lan

doi:10.1117/12.478255

15 January 2003 Inverse model for optimizing the process of fabricating a microstructure by Laser Chemical Vapor Deposition

Chaoyang Zhang, Weizhong Dai, Raja Nassar, Hong Lan

Author Affiliations +

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.478255
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A laser-induced chemical vapor deposition (LCVD) process is capable of producing high aspect ratio microstructures of arbitrary shape and is rapid, flexible, and relatively inexpensive to operate. To achieve high resolution and accurate fabrication, predictive models must be developed for process control and optimization. In this paper, we present an inverse model for predicting and optimizing the scanning pattern of the laser beam on the surface of deposit in order to produce accurate microstructures with the desired geometry. We demonstrate the applicability of the model by simulating and optimizing the process for fabricating a microlens with a pre-specified geometry.

Citation Download Citation

Chaoyang Zhang, Weizhong Dai, Raja Nassar, and Hong Lan "Inverse model for optimizing the process of fabricating a microstructure by Laser Chemical Vapor Deposition", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.478255

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