Fabrication of high-brightness blue InGaN/GaN MQW LEDs

Yi Luo; Yanjun Han; Wenping Guo; Changzheng Sun; Zhi-Biao Hao; Hui Hu

doi:10.1117/12.483056

17 September 2002 Fabrication of high-brightness blue InGaN/GaN MQW LEDs

Yi Luo, Yanjun Han, Wenping Guo, Changzheng Sun, Zhi-Biao Hao, Hui Hu

Proceedings Volume 4918, Materials, Devices, and Systems for Display and Lighting; (2002) https://doi.org/10.1117/12.483056
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this article, we report the successful fabrication of high-brightness blue LEDs with InGaN/GaN multiple quantum well structures grown by low pressure metalorganic vapor phase epitaxy on sapphire substrates. The active region is composed of five pairs of InGaN well and GaN:Si barrier. The epitaxial wafer is processed into mesa diodes by inductively coupled plasma etching technique, with SiO₂ deposited by plasma-enhanced chemical vapor deposition as the etching mask. The diode chips are then encapsulated into transparent epoxy to form packaged LEDs. The typcial emitting spectrum of the blue LEDs shows a peak wavelength at 460 nm and a FWHM of 30 nm. The working voltage and output power of blue lEDs shows a peak wavelength at 460 nm and a FWHM of 30 nm. The working voltage and output power of blue LEDs at a forward current of 20 mA are 3.6V and 1.5mW, respectively. The reverse leakage current at 5V was about 5μA , and the wavelength uniformity is 0.25 nm.

Citation Download Citation

Yi Luo, Yanjun Han, Wenping Guo, Changzheng Sun, Zhi-Biao Hao, and Hui Hu "Fabrication of high-brightness blue InGaN/GaN MQW LEDs", Proc. SPIE 4918, Materials, Devices, and Systems for Display and Lighting, (17 September 2002); https://doi.org/10.1117/12.483056

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available