Three-dimensional microfabrication by laser-induced chemical deposition

Libing Liu; Minghui Li; Yi Zhao; Chaoxiang Yang

doi:10.1117/12.482899

12 September 2002 Three-dimensional microfabrication by laser-induced chemical deposition

Libing Liu, Minghui Li, Yi Zhao, Chaoxiang Yang

Proceedings Volume 4915, Lasers in Material Processing and Manufacturing; (2002) https://doi.org/10.1117/12.482899
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A new technique about microfabrication and Rapid Prototyping named Laser-induced Chemical Deposition based Rapid Prototyping (LCD&RP) is proposed. Laser-induced chemical deposition can further be sub-divided as vapor, solid and liquid. The Laser-induced Chemical Vapor Deposition based Rapid Prototyping (LCVD&RP) process has been used in for several years, and it has faced some critical problems in deposition rate and facility cost. To overcome these shortcomings and explore new chemical deposition methods and materials, Laser-induced Chemical Liquid Deposition based Rapid Prototyping (LCLD&RP) is based on the following experimental fact: when a laser beam expanded passes through a reflector and a lens, then the beam is focused on a substrate immerging in cold (room temperature) liquid reactant, which makes the areal substrate heated and takes place chemical reaction to deposit a solid material. By controlling the motion of laser beam and process parameters, a desired three-dimensional microstructure of deposited material can be formed through layer-by-layer scanning. According to the initial experimental results, the feasibility of LCLD&RP is discussed and demonstrated.

Citation Download Citation

Libing Liu, Minghui Li, Yi Zhao, and Chaoxiang Yang "Three-dimensional microfabrication by laser-induced chemical deposition", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); https://doi.org/10.1117/12.482899

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