Development of beam-pointing compensating optical system for aspheric beam shaper of PWB laser drilling system

Koki Ichihashi; Daiji Narita; Yasuhiro Mizutani; Katsuichi Ukita; Hidehiko Karasaki

doi:10.1117/12.486581

19 February 2003 Development of beam pointing compensating optical system for aspheric beam shaper of PWB laser drilling system

Koki Ichihashi, Daiji Narita, Yasuhiro Mizutani, Katsuichi Ukita, Hidehiko Karasaki

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486581
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

In a PWB laser drilling system, an aspheric beam shaper, which converts single-mode Gaussian beam into beam with uniform irradiance profile is widely used. This beam shaper is very sensitive to decentering of the input beam, which is caused by the instability of beam pointing. It degrades the irradiance profile uniformity of the output beam and the processing quality. To solve this problem, we develop a beam pointing compensation optical system. This system contains a newly designed collimator which have a function to project the origin of the pointing vector of the laser beam to the input surface of the shaper in addition to the conventional function to control the diameter and the wavefront curvature of the laser beam. We analyzed the performance of the collimator by simulation, and confirmed that the irradiance distribution of output beam was not degraded by the instability of the beam pointing. Also, we confirmed its effects by the optical experiments.

Citation Download Citation

Koki Ichihashi, Daiji Narita, Yasuhiro Mizutani, Katsuichi Ukita, and Hidehiko Karasaki "Development of beam pointing compensating optical system for aspheric beam shaper of PWB laser drilling system", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486581

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