Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools

Christian Rembe; Rishi Kant; Michael P. Young; Richard S. Muller

doi:10.1117/12.468188

22 May 2002 Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools

Christian Rembe, Rishi Kant, Michael P. Young, Richard S. Muller

Proceedings Volume 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2002) https://doi.org/10.1117/12.468188
Event: Fifth International Conference on Vibration Measurements by Laser Techniques, 2002, Ancona, Italy

Abstract

We describe an advanced interferometric testing system that we have built at the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. The system provides live dynamic views of microelectromechanical devices as well as precise measurements of their motions in three dimensions. A high-speed interface feeds these signals to an ultra-high-performance network (SuperNet), which can deliver them to remote locations where they can, for example, be compared to simulations. An illustrative example using a nonlinear oscillating microactuator demonstrates the utility of the system.

Citation Download Citation

Christian Rembe, Rishi Kant, Michael P. Young, and Richard S. Muller "Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools", Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); https://doi.org/10.1117/12.468188

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