Air optical breakdown on silicon as a novel method to fabricate photoluminescent Si-based nanostructures

Andrei V. Kabashin; Michel Meunier

doi:10.1117/12.459737

18 March 2002 Air optical breakdown on silicon as a novel method to fabricate photoluminescent Si-based nanostructures

Andrei V. Kabashin, Michel Meunier

Proceedings Volume 4636, Nanoscience Using Laser-Solid Interactions; (2002) https://doi.org/10.1117/12.459737
Event: High-Power Lasers and Applications, 2002, San Jose, California, United States

Abstract

A novel dry, vacuum-free laser-assisted method for a fabrication of nanostructured Si/SiO_x layers on a silicon wafer is demonstrated. This method uses the phenomenon of air optical breakdown to modify a semiconductor surface. Pulsed radiation from a CO₂ laser was focused on a silicon wafer to initiate the optical breakdown in atmospheric pressure air. After several breakdown initiations near the threshold of plasma production, a gray-tint layer was formed under the radiation spot on the silicon surface. The size of the processed area could be controlled by varying the radiation focusing conditions. Properties of the layers were studied by optical and SEM microscopies, XPS, XRD, Specular X-ray Reflectivity and PL spectroscopy. It was found that the layers had the porosity of about 75-80% and contained nanoscale holes and channels. They consisted of silicon nanocrystals embedded in SiO₂ matrix and exhibited strong photoluminescence (PL) at 1.9-2.0 eV, which could be seen by naked eyes. Possible mechanisms of nanostructure formation and PL origin are discussed. The method can be used for a controlled local patterning of photoluminescent nanostructured materials.

Citation Download Citation

Andrei V. Kabashin and Michel Meunier "Air optical breakdown on silicon as a novel method to fabricate photoluminescent Si-based nanostructures", Proc. SPIE 4636, Nanoscience Using Laser-Solid Interactions, (18 March 2002); https://doi.org/10.1117/12.459737

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available