Fabrication of photonic crystals in multilayer organic films

Janusz A. Murakowski; Dennis W. Prather

doi:10.1117/12.437272

24 July 2002 Fabrication of photonic crystals in multilayer organic films

Janusz A. Murakowski, Dennis W. Prather

Author Affiliations +

Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.437272
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

We present a novel method for making 2D photonic crystal structures. The method relies on exposing a multilayer electron beam resist. The different layers exhibit different dissolution rates in the developer, which makes it possible to produce a perforated membrane released from the substrate if the resist closest to the substrate has a higher dissolution rate than the resist on the surface. The entire structure is created in a single development step. Various structures fabricated with this method are reported.

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Janusz A. Murakowski and Dennis W. Prather "Fabrication of photonic crystals in multilayer organic films", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.437272

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