Fabrication of microstamps used for oligonucleotide array synthesis

Pengfeng Xiao; Nongyao He; Zhengchun Liu; Quanguo He; Jiqing Xu; Zuhong Lu

doi:10.1117/12.444750

15 October 2001 Fabrication of microstamps used for oligonucleotide array synthesis

Pengfeng Xiao, Nongyao He, Zhengchun Liu, Quanguo He, Jiqing Xu, Zuhong Lu

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444750
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

A polydimethylsiloxane (PDMS) stamp with well-defined features on its surface was fabricated through soft lithography. First, we intended to increase the molecular interaction between the PDMS materials and its supporting substrate through surface modification with self-assembly technique. A silane molecular monolayer has been produced on a glass plate by treatment with 5% (CH₃)₂SiCl₂ in CH₃Cl. Secondary, we optimized the thickness of the PDMS stamps between 6x10^-4m and 1.0x10^-3m, and the feature highness 1.5x10^-5m, and thus the stamp shrinkage could be controlled within 0.0417% in linearity or within 0.286% in area, respectively. Third, we modified the surface of the master through chemical plating silver or aluminum to prevent the PDMS from sticking to the master surface. During curing process of the stamp fabrication, PDMS intends to shrink towards the silanized glass plate from the master surface, which helps to peel stamp from the master without damaging its features.

Citation Download Citation

Pengfeng Xiao, Nongyao He, Zhengchun Liu, Quanguo He, Jiqing Xu, and Zuhong Lu "Fabrication of microstamps used for oligonucleotide array synthesis", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444750

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