Comparison of layered surface acoustic wave transducers with different guiding metal oxide films for immunosensing applications

Kourosh Kalantar-Zadeh; Yuen Yuen Chen; Benjamin N. Fry; Wojtek Wlodarski; Adrian Trinchi

doi:10.1117/12.454589

19 November 2001 Comparison of layered surface acoustic wave transducers with different guiding metal oxide films for immunosensing applications

Kourosh Kalantar-Zadeh, Yuen Yuen Chen, Benjamin N. Fry, Wojtek Wlodarski, Adrian Trinchi

Author Affiliations +

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454589
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Layered Surface Acoustic Wave (SAW)immunosensors based on a substrate crystal cut that allows the propagation of Surface Skimming Bulk Wave (SSBW)have been fabricated. SiO2 and ZnO films with different thicknesses deposited onto the substrate to form the SAW device. The layered SAW device developed is a gravimetric sensor.Upon exposures to solutions containing IgG, the operational frequency of the system incorporating the sensor changes. In this paper, the sensitivity of the SAW devices with different film thicknesses will be compared. Their response to the biochemical components will be investigated.

Citation Download Citation

Kourosh Kalantar-Zadeh, Yuen Yuen Chen, Benjamin N. Fry, Wojtek Wlodarski, and Adrian Trinchi "Comparison of layered surface acoustic wave transducers with different guiding metal oxide films for immunosensing applications", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454589

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