Impact of graybeam method of virtual address reduction on image quality

Chris A. Mack

doi:10.1117/12.458331

11 March 2002 Impact of graybeam method of virtual address reduction on image quality

Chris A. Mack

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458331
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

In both optical and electron beam raster scan imaging for mask making or direct write on wafer, graybeam techniques are used to create a small virtual address grid while maintaining a large physical address grid. Using simple simulations of aerial image formation as the summation of Gaussian spots, several important conclusions about the use of graybeam are made. Graybeam results in a non-linear variation in edge position with gray level, with the non- linearity increasing with larger physical address grid size. While this edge position deviation form non-linearity can be calibrated out of the writing tool, the calibration curve is process dependent. One problem with the use of graybeam is the reduction of image quality as expressed by the image log-slope. For the case of a physical address grid equal to half of the spot size, the worst case graybeam level has an image log-slope at the edge that is 20 percent less than the best case.

Citation Download Citation

Chris A. Mack "Impact of graybeam method of virtual address reduction on image quality", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458331

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available