Printing systems for MEMS packaging

Donald J. Hayes; Weldon Royall Cox; David B. Wallace

doi:10.1117/12.443003

2 October 2001 Printing systems for MEMS packaging

Donald J. Hayes, Weldon Royall Cox, David B. Wallace

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443003
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Ink-jet printing technology is, in many ways, ideally suited for addressing a number of these MEMS device packaging challenges. The general advantages of this form of microdispensing derive from the incorporation of data-driven, non-contact processes which enable precise, picoliter-level volumes of material to be deposited with high accuracy and speed at target sites, even on non-planar surfaces. Being data-driven, microjet printing is a highly flexible and automated process which may readily be incorporated into manufacturing lines. It does not require application-specific tooling such as photomasks or screens, and, as an additive process with no chemical waste, it is environmentally friendly. In short, the advantages obtainable with incorporation of micro-jet printing technology in many fabrication applications range from increased process capability, integration and automation to reduced manufacturing costs.

Citation Download Citation

Donald J. Hayes, Weldon Royall Cox, and David B. Wallace "Printing systems for MEMS packaging", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443003

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