High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution

W. Merlijn van Spengen; Ingrid De Wolf; Bob Puers

doi:10.1117/12.443001

2 October 2001 High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution

W. Merlijn van Spengen, Ingrid De Wolf, Bob Puers

Author Affiliations +

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443001
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

We report on the high-speed 3D imaging capabilities of a newly developed inspection tool for MEMS. The instrument is capable of performing an imaging operation for a complete image at once, which is a large advantage over scanning laser Doppler vibrometers and related equipment. This new instrument is able to `slow down' fringe movements when illuminating a MEMS device with a dedicated interferometer, by using a slow beat frequency between object excitation and reference beam excitation and averaging over a lot of phase images. It is used in such a way that an ordinary CCD camera can be used to obtain 3D images and movies of the periodic mechanical motion of MEMS devices, either in mechanical resonance when excited using a piezo actuator, or using electronic excitation with probe needles at any frequency required (up to the limitations of the waveform generators). Two modes of operation are possible: a mode in which slow deformations (seconds or more) can be monitored, and a mode in which fast periodic movements (100 Hz - 1 MHz) can be investigated. We show that this imaging technique is especially useful for the investigation of the mechanical behavior of MEMS, both to monitor the intended movement of a structure, and to have a close look at the erratic mechanical behavior of defective parts.

Citation Download Citation

W. Merlijn van Spengen, Ingrid De Wolf, and Bob Puers "High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443001

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