Characterization Of Semiconductor Silicon By Transmission Electron Microscopy

Teh Y. Tan

doi:10.1117/12.939302

10 May 1984 Characterization Of Semiconductor Silicon By Transmission Electron Microscopy

Teh Y. Tan

Proceedings Volume 0452, Spectroscopic Characterization Techniques for Semiconductor Technology I; (1984) https://doi.org/10.1117/12.939302
Event: 1983 Cambridge Symposium, 1983, Cambridge, United States

Abstract

In this review some basics of the transmission electron microscopy, the instrument, its operations and the types of scientific information obtainable from crystalline materials are first discussed and then some subjects pertaining to recent characterization of silicon are discussed. The subjects chosen are those that had outstanding impacts in technology and/or in science for which studies using the transmission electron microscope forms an indispensible part of the characterization efforts.

Citation Download Citation

Teh Y. Tan "Characterization Of Semiconductor Silicon By Transmission Electron Microscopy", Proc. SPIE 0452, Spectroscopic Characterization Techniques for Semiconductor Technology I, (10 May 1984); https://doi.org/10.1117/12.939302

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