Paper
24 October 2001 Analyzing biomolecular interactions by variable angle ellipsometry
Jiun-Yan Wu, Chih-Kung Lee, J. H. Lee, Shuen-Chen Shiue, Shu-Sheng Lee, Shiming Lin
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Abstract
In this paper, an innovative ellipsometer is developed and applied to metrology of the biomolecular interaction on a protein biochip. Both the theory, optical and opto-mechanical configurations of this newly developed ellipsometer and methodologies adopted in system design to improve the system performance are presented. It will be shown that by measuring the ellipsometric parameters, the corresponding concentration variation in biochemical reaction can be calculated according to stoichiometry analysis. By applying the variable angle ellipsometry to analysis of a multi-layered sample, the thickness and concentration are resolved. It is believed that the newly developed ellipsometer biosensor is able to undertake an accurate measurement on biomedical interaction.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiun-Yan Wu, Chih-Kung Lee, J. H. Lee, Shuen-Chen Shiue, Shu-Sheng Lee, and Shiming Lin "Analyzing biomolecular interactions by variable angle ellipsometry", Proc. SPIE 4434, Hybrid and Novel Imaging and New Optical Instrumentation for Biomedical Applications, (24 October 2001); https://doi.org/10.1117/12.446665
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KEYWORDS
Ellipsometry

Biological research

Reflectivity

Thin films

Metrology

Mirrors

Biomedical optics

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