Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers

Constantine P. Grigoropoulos; Dongsik Kim

doi:10.1117/12.456822

25 February 2002 Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers

Constantine P. Grigoropoulos, Dongsik Kim

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456822
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

Liquid-assisted steam nanosecond pulsed laser irradiation is shown to be effective for cleaning contaminant particles as small as 0.3 micrometers in diameter from metallic substrates. The cleaning threshold and efficiency are investigated for the fundamental and frequency-tripled Nd:YAG laser harmonics (wavelengths (lambda) equals1064 and 355 nm). The rapid phase- change and thin liquid film ablation processes are examined in order to elucidate the cleaning mechanism. The pressure enhancement accompanying the explosive-vaporization process and the momentum supplied by the ablation plume are the main sources of the augmented cleaning efficiency at moderate laser energy densities.

Citation Download Citation

Constantine P. Grigoropoulos and Dongsik Kim "Liquid-assisted pulsed laser cleaning with near-infrared and ultraviolet pulsed lasers", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456822

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