Paper
22 October 2001 Investigation into the measuring of the length spacing of step gauges
Author Affiliations +
Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445642
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany
Abstract
This presentation describes an investigation into the interferometric measurement of the length spacing of the faces of a step gauge using the fringe fraction method. The system used was originally developed to measure the flatness and parallelism of the faces.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oelof A. Kruger "Investigation into the measuring of the length spacing of step gauges", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445642
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Cited by 2 scholarly publications.
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KEYWORDS
Interferometers

Calibration

Interferometry

Cameras

Metrology

Mirrors

Temperature metrology

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