Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization

Sylvain Petitgrand; Reda Yahiaoui; Alain Bosseboeuf; Kamran Danaie

doi:10.1117/12.445605

23 October 2001 Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization

Sylvain Petitgrand, Reda Yahiaoui, Alain Bosseboeuf, Kamran Danaie

Author Affiliations +

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445605
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Interferometric optical profilometers are increasingly used for the characterization of the static deformation of micromechanical devices and Micro(Opto)Electromechanical Systems (M(O)EMS). Recent works have shown that they can also be used for full field dynamic measurements provided that a stroboscopic light source is added or that time averaging of the interferograms is performed. In this work we investigate two methods to make quantitative time-averaged microscopic interferometric measurements. Both methods are based on the calibration of the fringe contrast variation as function of the vibration amplitude. It is demonstrated from experiments on micromechanical devices that 3D vibration modes shapes can be measured at any frequency with a spatial resolution in the micrometer range and a detection limit around 5 nm.

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Sylvain Petitgrand, Reda Yahiaoui, Alain Bosseboeuf, and Kamran Danaie "Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445605

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