Novel algorithm for hot-carrier lifetime projection on thick gate PMOSFETs fabricated by 0.18-um CMOS technology

Bin Bin Jie; Indrajit Manna; Xu Zeng; Qiang Guo; Keng Foo Lo

doi:10.1117/12.404884

23 October 2000 Novel algorithm for hot-carrier lifetime projection on thick gate PMOSFETs fabricated by 0.18-um CMOS technology

Bin Bin Jie, Indrajit Manna, Xu Zeng, Qiang Guo, Keng Foo Lo

Author Affiliations +

Proceedings Volume 4229, Microelectronic Yield, Reliability, and Advanced Packaging; (2000) https://doi.org/10.1117/12.404884
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

It is critical how to project hot-carrier lifetime form wafer level hot-carrier injection (HCl) test data, due to the limited stress time. It is well known that both oxide charge formation and interface trap generation affect the degradation of thick gate PMOSFETs fabricated by 0.18 micrometers technology. Based on it, a new fitting mode and the corresponding fitting algorithm were proposed. Form only one experimental curve of any degradation versus stress time under any HCl stress condition, the corresponding fitting curve can be obtained using this model. Form the fitting curve, the hot-carrier lifetime under the corresponding stress condition can be extracted. It is shown here that the model is quite accurate. This algorithm is quite robust to extract HCl lifetime as well.

Citation Download Citation

Bin Bin Jie, Indrajit Manna, Xu Zeng, Qiang Guo, and Keng Foo Lo "Novel algorithm for hot-carrier lifetime projection on thick gate PMOSFETs fabricated by 0.18-um CMOS technology", Proc. SPIE 4229, Microelectronic Yield, Reliability, and Advanced Packaging, (23 October 2000); https://doi.org/10.1117/12.404884

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available