Mechanism of instability on device's characteristics due to intermetal dielectrics with low-k material and the modified process

Jiaw-Ren Shih; J. C. Hwang; R. Y. Shiue; H. L. Hwang; John T. Yue

doi:10.1117/12.405389

24 October 2000 Mechanism of instability on device's characteristics due to intermetal dielectrics with low-k material and the modified process

Jiaw-Ren Shih, J. C. Hwang, R. Y. Shiue, H. L. Hwang, John T. Yue

Author Affiliations +

Proceedings Volume 4227, Advanced Microelectronic Processing Techniques; (2000) https://doi.org/10.1117/12.405389
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

In this paper, the effects of back-end process on device characteristic shift are explored. It had been found that the transistors with different inter-metal-dielectric (IMD) films have different performance. Moreover, more of the IMD layers will result in more of the electrical characteristic shifts. The shift is dominated by the interface state reduction. The mode of plasma-enhanced hydrogen out- diffusion during IMD film deposition is proposed to explain the BEOL-relate device shift. In order to relive this effect of electrical characteristic shift, another alloy step by pure hydrogen anneal is implemented after metal-1 etch and before the Via-1 deposition. It is found the electrical characteristics taken at metal-1 stage are very close to those taken at melal-6 with passivation step. In addition, there is no apparent hot carrier lifetime degradation with or without the pure hydrogen treatment.

Citation Download Citation

Jiaw-Ren Shih, J. C. Hwang, R. Y. Shiue, H. L. Hwang, and John T. Yue "Mechanism of instability on device's characteristics due to intermetal dielectrics with low-k material and the modified process", Proc. SPIE 4227, Advanced Microelectronic Processing Techniques, (24 October 2000); https://doi.org/10.1117/12.405389

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available