Integrated multimode interference couplers in silicon-on insulator

Hongzhen Wei; Jinzhong Yu; Xiaofeng Zhang; Zhongli Liu; Hongzhi Ma; Guohua Li; Wei Shi; Changshui Fang

doi:10.1117/12.402688

9 October 2000 Integrated multimode interference couplers in silicon-on insulator

Hongzhen Wei, Jinzhong Yu, Xiaofeng Zhang, Zhongli Liu, Hongzhi Ma, Guohua Li, Wei Shi, Changshui Fang

Author Affiliations +

Proceedings Volume 4225, Optical Interconnects for Telecommunication and Data Communications; (2000) https://doi.org/10.1117/12.402688
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0 micrometer) can be used in SOI waveguide due to the large index step between Si and SiO₂, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 X 4 and 2 X 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8 dB. The devices show uniform power distribution.

Citation Download Citation

Hongzhen Wei, Jinzhong Yu, Xiaofeng Zhang, Zhongli Liu, Hongzhi Ma, Guohua Li, Wei Shi, and Changshui Fang "Integrated multimode interference couplers in silicon-on insulator", Proc. SPIE 4225, Optical Interconnects for Telecommunication and Data Communications, (9 October 2000); https://doi.org/10.1117/12.402688

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KEYWORDS

Waveguides

Brain-machine interfaces

Silicon

Tolerancing

Cladding

Etching

Integrated optics

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