Three-dimensional laser inverse scattering phase method for evaluating microstructure

Yasuhiro Takaya; Atsushi Taguchi; Satoru Takahashi; Takashi Miyoshi

doi:10.1117/12.403851

10 October 2000 Three-dimensional laser inverse scattering phase method for evaluating microstructure

Yasuhiro Takaya, Atsushi Taguchi, Satoru Takahashi, Takashi Miyoshi

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Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403851
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The 3D laser inverse scattering phase method offers the advantage of measuring a 3D microprofile within the whole area illuminated by laser beam at one time. No scanning process is required as you see in SPM (Scanning Probe Microscope). So, this method finds application where the in-process measurement of a 3D microprofile with accuracy in the nanometer order is required for the process error evaluation. The work reported in this paper deals with development of a new iterative Fourier phase retrieval algorithm based on practical object-domain constraints and actual measurements of a NIST traceable surface topography reference with rectangular pockets 44nm deep at intervals of 10micrometers . The results obtained in the measurements show the validity of the newly developed laser inverse scattering phase method.

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Yasuhiro Takaya, Atsushi Taguchi, Satoru Takahashi, and Takashi Miyoshi "Three-dimensional laser inverse scattering phase method for evaluating microstructure", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403851

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KEYWORDS

Inverse scattering

Laser scattering

3D metrology

3D microstructuring

Phase retrieval

Fourier transforms

Diffraction

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