MEMS/MOEMS for lightwave networks: Can little machines make it big?

David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; Jim A. Walker

doi:10.1117/12.396433

25 August 2000 MEMS/MOEMS for lightwave networks: Can little machines make it big?

David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, Jim A. Walker

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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396433
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

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David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, and Jim A. Walker "MEMS/MOEMS for lightwave networks: Can little machines make it big?", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396433

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