Paper
19 October 2000 Prospects of amorphous-silicon-based photonic networks
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Abstract
The prospects for a thin film amorphous silicon based integrated photonic technology spanning materials, devices, and physics are described. Impurity implantation is an effective technique for the preparation of permanent refractive index patterning due to the very high solubility limits of the amorphous phase. Methods of preparing films of the requisite thickness and smoothness for photonic application have been identified. Other experiments suggest that there is a light induced refractive index change of sufficient magnitude for patterning light adaptive and/or light defined optical elements. Two light induced refractive index changes, one fast and one slow, were observed in amorphous silicon materials. These changes were observed over temperatures ranging from room temperature to 250 degree(s)C and do not appear to diminish with increasing temperature over this range. Simulations were used to elucidate the physics of light induced change. Several classes of thin film devices were developed which span a wide range of functionality.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles M. Fortmann, Enrique L. Jaen, and Nobuhiro Hata "Prospects of amorphous-silicon-based photonic networks", Proc. SPIE 4110, Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications VI, (19 October 2000); https://doi.org/10.1117/12.404781
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Cited by 4 scholarly publications.
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KEYWORDS
Amorphous silicon

Refractive index

Silicon

Silicon films

Photonic devices

Crystals

Hydrogen

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