Diffusive layering during film growth in two-component systems with limited mutual solubility

Grigory Valerievitch Merkulov; Valentin M. Ievlev; Evgeny V. Shvedov; Vadim P. Ampilogov

doi:10.1117/12.390594

30 June 2000 Diffusive layering during film growth in two-component systems with limited mutual solubility

Grigory Valerievitch Merkulov, Valentin M. Ievlev, Evgeny V. Shvedov, Vadim P. Ampilogov

Proceedings Volume 4097, Complex Mediums; (2000) https://doi.org/10.1117/12.390594
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In the work the range of deposition temperatures for the Ag-Cu systems, in which the oriented phase layering takes place, has been experimentally determined. The mechanism of this process has been analyzed. During the simultaneous deposition the well-oriented film structures with practically parallel mutual orientation of crystal lattices of Cu and Ag phases of high dispersity, alternating across the film thickness, have been received. At room temperature the two-phase nanocrystal heterosystem with lateral grain size of 10-20 nm has been formed. The closeness in the parameters of crystal lattices is, mainly, caused by the decrease of a_Ag to the values of 0.402-0.405nm in the substrate temperature range up to 570 K, which corresponds to solubility of Cu in Ag nanocrystals as much as 17%. When the substrate temperature increase in relatively narrow temperature range near 520 K, the oriented crystallization with parallel conjugation of the substrate and the lattices of Ag and Cu takes place with the grain structure dispersity preserved. The well defined double diffraction on the grains of both nanocrystal phases and the homogeneous concentration of components for the whole film thickness support the relative position of the phases as the alternating lamellae. Thus, during the film growth the direction leads to the formation of irregular layered compositions, consisting of very fine mutually oriented lamellae of both phases as large as several nanometers in diameter. The numerical values are in agreement with the experimental results.

Citation Download Citation

Grigory Valerievitch Merkulov, Valentin M. Ievlev, Evgeny V. Shvedov, and Vadim P. Ampilogov "Diffusive layering during film growth in two-component systems with limited mutual solubility", Proc. SPIE 4097, Complex Mediums, (30 June 2000); https://doi.org/10.1117/12.390594

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