Surface texturing of crystalline silicon and effective area measurement

Tietun Sun; Dong Chen; Rongqiang Chui

doi:10.1117/12.408408

29 November 2000 Surface texturing of crystalline silicon and effective area measurement

Tietun Sun, Dong Chen, Rongqiang Chui

Author Affiliations +

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408408
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

In this paper, the surface area of solar cell is determined by the capacitance measurements of MOS structure. The texture etching technology can be controlled according to the change of silicon surface area, furthermore, the textured silicon surface and interface characteristic of solar cell can be studied by measuring the relationship of capacitance and voltage for MOS structure.

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Tietun Sun, Dong Chen, and Rongqiang Chui "Surface texturing of crystalline silicon and effective area measurement", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408408

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