Low-temperature preparation of BaTiO3 thin film by MOD and hydrothermal treatment

Zhiqiang Wei; Huaping Xu; Kaoru Yamashita; Masanori Okuyama

doi:10.1117/12.408342

29 November 2000 Low-temperature preparation of BaTiO₃ thin film by MOD and hydrothermal treatment

Zhiqiang Wei, Huaping Xu, Kaoru Yamashita, Masanori Okuyama

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408342
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

BaTiO₃ (BTO) thin films with perovskite structure have been prepared on Ti/Pt/Ti/SiO₂/Si substrate using a combined process of conventional MOD process and hydrothermal method. BTO thin films with polycrystalline structure are obtained on silicon at low processing temperatures lower than 200 degree(s)C. The film thickness ranged from 0.20 to 0.84 micrometers . The structural and ferroelectric properties were investigated as a function of film thickness by x-ray diffraction, scanning electron microscopy, Raman spectroscopy and ferroelectric test system. The film retains the tetragonal perovskite structure with the (100) preferred orientation perpendicular to the film surface independent of film thickness. With increasing of thickness, polarization and coercive field of BaTiO₃ thin films increased and shown the same trends.

Citation Download Citation

Zhiqiang Wei, Huaping Xu, Kaoru Yamashita, and Masanori Okuyama "Low-temperature preparation of BaTiO₃ thin film by MOD and hydrothermal treatment", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408342

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