ED-Litho color filter process and its application

ChunHsiang Wen; ShuHway Cheng; YawTing Wu; Hong-Da Liu; ChingHer Chao; Jun-Ichi Yasukawa

doi:10.1117/12.392114

11 July 2000 ED-Litho color filter process and its application

ChunHsiang Wen, ShuHway Cheng, YawTing Wu, Hong-Da Liu, ChingHer Chao, Jun-Ichi Yasukawa

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392114
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

The ED-Litho (Electrodeposition-Lithography) process is a unique method for making color filters, which combines electrodeposition of pigmented organic coating on ITO (Indium Tin Oxide) glass and a special photolithography technique based on a MDPR (MultiDeveloping PhotoResist). This process represents one of the potential methods to achieve low cost and high quality in the fabrication of color filter. This paper will report the related technologies and discuss the color performance used in TFT- LCD (Thin Film Transistor Liquid Crystal Display) panel.

Citation Download Citation

ChunHsiang Wen, ShuHway Cheng, YawTing Wu, Hong-Da Liu, ChingHer Chao, and Jun-Ichi Yasukawa "ED-Litho color filter process and its application", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392114

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