Gate CD control for full chip using total-process-proximity-based correction method

Byung-Ho Nam; Jong O Park; Dai Jong Lee; Jong Ho Cheong; Young Ju Hwang; Young Jin Song

doi:10.1117/12.392101

19 July 2000 Gate CD control for full chip using total-process-proximity-based correction method

Byung-Ho Nam, Jong O Park, Dai Jong Lee, Jong Ho Cheong, Young Ju Hwang, Young Jin Song

Proceedings Volume 4066, Photomask and Next-Generation Lithography Mask Technology VII; (2000) https://doi.org/10.1117/12.392101
Event: Photomask and Next Generation Lithography Mask Technology VII, 2000, Kanagawa, Japan

Abstract

In this study, we investigated mask errors, photo errors with attenuated phase shift mask and off-axis illumination, and etch errors in dry etch condition. We propose that total process proximity correction (TPPC), a concept merging every step error correction, is essential in lithography process when minimum critical dimension (CD) smaller than the wavelength of radiation. A correction rule table was experimentally obtained applying TPPC concept. Process capability of controlling gate CD in DRAM fabrication should be improved by this method.

Citation Download Citation

Byung-Ho Nam, Jong O Park, Dai Jong Lee, Jong Ho Cheong, Young Ju Hwang, and Young Jin Song "Gate CD control for full chip using total-process-proximity-based correction method", Proc. SPIE 4066, Photomask and Next-Generation Lithography Mask Technology VII, (19 July 2000); https://doi.org/10.1117/12.392101

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available