Theoretical calculations of photoabsorption of molecules in the vacuum ultraviolet region

Nobuyuki N. Matsuzawa; Shigeyasu Mori; Ei Yano; Shinji Okazaki; Akihiko Ishitani; David A. Dixon

doi:10.1117/12.388321

23 June 2000 Theoretical calculations of photoabsorption of molecules in the vacuum ultraviolet region

Nobuyuki N. Matsuzawa, Shigeyasu Mori, Ei Yano, Shinji Okazaki, Akihiko Ishitani, David A. Dixon

Proceedings Volume 3999, Advances in Resist Technology and Processing XVII; (2000) https://doi.org/10.1117/12.388321
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The theoretical design of transparent materials for use as photoresist materials for F₂ lithography (157 nm) requires molecular orbital calculations of the photoabsorption of molecules in the vacuum ultraviolet (VUV) region. To predict photoabsorption, this study employed ab initio molecular orbital calculations at the level of single-excitation configuration interaction (CIS) combined with an empirical correction to the calculated peak position. This method was used to calculate the photoabsorption spectra of various functional groups, such as alcohol, ether, ketone, carboxylic acid and ester groups, as well as several polymers and alicyclic groups. On the basis of the calculation results, the applicability of these functional groups to photoresists for F₂ lithography is discussed.

Citation Download Citation

Nobuyuki N. Matsuzawa, Shigeyasu Mori, Ei Yano, Shinji Okazaki, Akihiko Ishitani, and David A. Dixon "Theoretical calculations of photoabsorption of molecules in the vacuum ultraviolet region", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); https://doi.org/10.1117/12.388321

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